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管式石墨舟上下料设备
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Introduction
Features
Field
Specifications
Pipe fittings
实现硅片在石英舟和花篮之间的上下料
兼容不同厂家的管式PECVD设备
Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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